Nature Nanotechnology
http://www.nature.com/nnano/current_issue/rss/
Hanbin Song
Abstract
Colour centres provide an optical interface to quantum registers based on electron and nuclear spin qubits in solids. The T centre in silicon is an emerging spin–photon interface that combines telecom O-band optical transitions and an electron spin in a scalable photonics platform. Here we integrate T centres into single-mode photonic waveguides in a silicon-on-insulator platform. We demonstrate the initialization, coherent control and state read-out of a three-qubit register based on the electron spin of a T centre coupled to a hydrogen and a silicon nuclear spin. The spin register exhibits spin echo coherence times of 0.41(2) ms for the electron spin, 112(12) ms for the hydrogen nuclear spin and 67(7) ms for the silicon nuclear spin. We use nuclear–nuclear two-qubit gates to generate entanglement between the two nuclear spins with a fidelity of F = 0.77(3) and a coherence time of ({T}_{2}^{* }=2.60(8)) ms. Our results show that a T centre in silicon photonics can realize a multi-qubit register with an optical interface for quantum communication.
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Data availability
The data underlying these experiments are available via Zenodo at https://doi.org/10.5281/zenodo.17239007 (ref. 38). All other data that support the plots within this paper and other findings of this study are available from the corresponding author upon reasonable request.
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Acknowledgements
We thank C. Afradi and K. Godeneli for experimental assistance and A. Faraon for feedback on the paper. This work was primarily supported by the US Department of Energy, Office of Science, Basic Energy Sciences in Quantum Information Science (Award No. DE-SC0022289 for qubit synthesis and characterization and first-principles modelling). L.K., Y.Z. and A. Sipahigil acknowledge support from the National Science Foundation (QLCI programme through Grant No. OMA-2016245, and Award No. 2137645). We acknowledge further support for cryogenic instrumentation from the Office of Advanced Scientific Computing Research, Office of Science, US Department of Energy (Contract No. DE-AC02-05CH11231) and Berkeley Lab FWP FP00013429. X.Z. acknowledges support from the Miller Institute for Basic Research in Science. The devices used in this work were fabricated at the Berkeley Marvell NanoLab and the Molecular Foundry at Berkeley Lab.
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H.S. designed and fabricated the devices with assistance from S.D., L.K., A. Schwartzberg and N.F. H.S. and L.K. built the measurement set-up with assistance from Y.Z., N.F. and X.Z. H.S. conducted the measurements and analysed the experimental results with support from X.Z., N.F., T.S., Z.-H.Z. and A. Sipahigil. Y.X. and G.H. performed the first-principles calculations. H.S., Z.-H.Z., Y.X. and A. Sipahigil wrote the paper with feedback from all authors. A. Sipahigil conceived and supervised the work.
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Nature Nanotechnology thanks Mete Atature, Elizaveta Semenova and the other, anonymous, reviewer(s) for their contribution to the peer review of this work.
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Extended data
Extended Data Fig. 1 Experimental setup.
Black lines represent optical fibers and coaxial cables. Blue lines represent coaxial cable connections for sequence control and synchronization. BS: Beam splitter. PC: Polarization controller. AOM: Acousto-optic modulator. VOA: Variable optical attenuator. PBS: Polarizing beam splitter. WM: wavemeter. PM: Power meter. SNSPD: Superconducting nanowire single photon detector. TT: Time tagger. Rb Std: Rubidium frequency standard. AWG: Arbitrary waveform generator. Att: Attenuator. LO: Local oscillator. AMP: amplifier. The dashed box shows extra setup for nuclear Hahn echo measurement.
Extended Data Fig. 2 Device fabrication.
1-3, 7) Ion implantation and rapid thermal annealing for T centre generation. 4-6) Electron-beam lithography and optical lithography steps for defining photonic waveguides. 8-10) Niobium sputtering and optical lithography for metal transmission line. We use electron-beam lithography to pattern SiO2 masks (FOX15) to protect photonic waveguides during metal etching. 11) Side view of the photonic waveguide, the tapered waveguide end of the chip is exposed for fiber coupling. 12) Wet release of the device with buffered oxide etcher (BOE). FOX15 masks are also removed with BOE.
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Supplementary Figs. 1–10, Appendices A–I and Table 1.
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Song, H., Zhang, X., Komza, L. et al. Entanglement of a nuclear spin qubit register in silicon photonics.
Nat. Nanotechnol. (2025). https://doi.org/10.1038/s41565-025-02066-0
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DOI: https://doi.org/10.1038/s41565-025-02066-0

