AI Insight
Researchers from Singapore have developed a silicon nitride waveguide that generates broadband light by substituting deuterium for hydrogen in the manufacturing process. The waveguide was fabricated on an 8-inch wafer using low-temperature methods compatible with standard CMOS semiconductor processes. This deuterium substitution reduces optical losses while maintaining compatibility with large-scale chip manufacturing.
Why it matters
The development enables the production of broadband light sources directly on semiconductor chips, which is essential for applications in optical communications, sensing, and photonic computing. The compatibility with existing CMOS manufacturing processes means the technology could be readily integrated into current semiconductor production facilities.
Understand the Science
A research team from Singapore, led by Associate Professor Dawn Tan of the Singapore University of Technology and Design (SUTD) and Dr. Luo Xianshu, head of the Silicon Photonics Department at the A*STAR Institute of Microelectronics (A*STAR IME), has developed a low-loss silicon nitride waveguide that generates broadband light on a chip. By replacing hydrogen with its heavier isotope, deuterium, the team fabricated the low-loss SiN waveguide on an 8-inch wafer using a low-temperature process, demonstrating its potential for large-scale manufacturing and integration with CMOS-compatible semiconductor processes.
Source: Deuterium enables chip waveguides to generate broadband light from infrared pulses